- In the modified granular activated carbon (modified AC) hydrogen peroxide as a catalyst.
- Resistant to acid, the reaction rate, without adjustment of pH, low system cost of implementation.
- Compared to current methods, without adding chemicals such as HCl, Cl2 and so there will not be a by-product.
Applications:
After Piranha Clean (SPM) cleaning process emissions of sulfuric acid containing hydrogen peroxide recovered after use
CMP and wet etching process for removing hydrogen peroxide in waste water and water recovery and mitigation of the impact on biological systems.
