Automatic Chemical Concentration Titration Measurement System
APMi is an online wet-chemical concentration monitoring system designed for high-demand processes such as semiconductor CMP, optoelectronics, and chemical cleaning. It features automatic sampling and real-time analysis, enabling rapid alerts and corrective actions when concentration drift occurs, thereby ensuring process stability and improving overall yield.
Key Specifications
| Analysis Method | Potentiometric / Standard Addition / Photometric |
| Accuracy | ±0.2% of displayed value |
| Precision | ±0.2% relative error |
| Measurement Time | < 5 minutes per measurement |
| Sample Volume | Approx. 0.05 – 5 mL (application dependent) |
| Acceptable Sample Temperature | Up to 200°F (93°C) |
| Water Consumption | 250 mL per measurement |
| Sample Inlet Pressure | < 30 PSI |
| DI Water Pressure | 20 – 40 PSI |
| CDA Supply Pressure | 60 – 80 PSI |
| Power Requirement | 110/220 VAC, 50/60 Hz, 1/0.5 A (field selectable) |
| Exhaust Requirement | 1.875" OD @ 17 CFM |
| Dimensions (inches) | 62.00" (H) × 20.50" (W) × 16.00" (D) |
| Custom Measurements | Customizable chemical concentration measurements upon request |