TF-LFA Thin-Film Thermal Conductivity Analyzer for Nanoscale Thin Films and Micro-Structured Materials

TF-LFA L54: Thin-Film Thermal Analysis System (Frequency-Domain Thermoreflectance, FDTR)

The TF-LFA L54 is an advanced thin-film thermal property measurement platform based on Frequency-Domain Thermoreflectance (FDTR). Using a non-contact optical approach, it enables precise thermal transport analysis and can measure thermal conductivity, thermal diffusivity, volumetric heat capacity, thermal effusivity, and thermal boundary conductance (TBC) of thin films and multilayer materials. It supports film thickness down to the nanometer scale, making it especially suitable for sub-micrometer structures and advanced process materials.

The system is widely applied in semiconductor thin films, coating materials, thermoelectric devices, LED packaging, optoelectronic materials, and 3D ICs, serving as a high-precision thermal characterization tool for both advanced R&D and industrial applications.

Key Features

Non-contact measurement: Laser heating and optical reflectance detection without disturbing sensitive or small samples.
High sensitivity and wide frequency response: Resolves heat transport behavior in thin films and interfaces at high modulation frequencies.
Auto-focus and optical path calibration: Reduces operational complexity while improving stability and repeatability.
Ultra-thin material capability: Supports thicknesses from approximately 10 nm to 20 µm, suitable for advanced material processing.
Wide operating temperature range: Thermal property analysis from room temperature up to 500°C.
Dual-laser configuration: 405 nm pump laser and 532 nm probe laser for improved signal stability and measurement resolution.
Expandable surface scanning and positioning: Supports thermal property mapping and image-assisted positioning.
Anisotropy analysis: Supports in-plane and cross-plane thermal conductivity measurements for 2D materials and stacked structures.

Measurement Method: Frequency-Domain Thermoreflectance (FDTR)

Frequency-Domain Thermoreflectance (FDTR) is a non-contact optical thermal transport analysis technique. During testing, the pump laser heats the sample surface at a modulated frequency. A synchronized probe laser detects tiny reflectance changes caused by the temperature rise. By analyzing the phase response in the frequency domain and fitting thermal transport models, key thermal property parameters can be extracted.

This method reduces common error sources found in traditional approaches, such as pulse-width effects and probe contact pressure, and is particularly suitable for: