Automatic Chemical Concentration Titration Measurement System
The SemiChem APM 200, Single Cell Floor Mount is an online wet-chemical concentration monitoring and automatic titration system designed for semiconductor CMP, cleaning processes, and advanced materials manufacturing. It features fully automated sampling, titration, and analysis to detect and correct chemical concentration drift in real time, helping to maintain process stability, improve yield, and reduce chemical consumption and scrap costs.
Key Technical Specifications
| Analysis Methods | Potentiometric / Standard Addition / Photometric |
| Accuracy | ±0.2% of displayed value |
| Precision | ±0.2% relative error |
| Measurement Time | < 5 minutes per measurement |
| Sample Volume | Approx. 0.05 – 5 mL (application dependent) |
| Acceptable Sample Temperature | Up to 200°F (93°C) |
| DI Water Consumption | 250 mL per measurement |
| Sample Inlet Pressure | < 30 PSI |
| DI Water Pressure | 20 – 40 PSI |
| CDA Supply Pressure | 60 – 80 PSI |
| Power Requirement | 110/220 VAC, 50/60 Hz, 1/0.5 A (field switchable) |
| Exhaust Requirement | 1.875" OD @ 17 CFM |
| Dimensions (inches) | 62.00" (H) × 20.50" (W) × 16.00" (D) |
| Custom Measurements | Custom chemical concentration measurements available upon request |