Online Mass Spectrometry Analyzer｜Key Technical Specifications
This system is equipped with a highly stable ion source and a scanning laminated electromagnetic analyzer, designed for real-time monitoring of process gases, residual gases, and compositional changes. It offers a wide measurement range, high long-term stability, and excellent linear performance.
Main Specifications
| Ion Source | Dual-filament electron impact ion source with programmable temperature (>120–200 °C, control accuracy ±0.1 °C) |
| Analyzer | Scanning laminated electromagnet, 6 cm radius, 80° deflection |
| Mass Range | Adjustable; standard 1–150 amu (ion acceleration voltage 1000 eV) Up to 1–200 amu at 750 V ion acceleration |
| Resolution | Dual collector resolution slits, standard 60 / 20; Optional 85/140 (0.36 mm / 0.69 mm), 100/45 (0.56 mm / 1.45 mm), or 45/140 (0.36 mm / 1.45 mm) |
| Mass Scale Stability | Drift < 0.013 amu at mass 28 over 24 hours |
| Peak Shape | At resolution 60, the ratio of flat-top width (99% height) to base peak width (5% height) is approximately 0.5 |
| Abundance Sensitivity | < 250 ppm at 27/28 amu |
| Detector | Standard Faraday detector; optional dual Faraday / SEM configuration |
| Inlet Interface | Temperature-controlled micro-capillary molecular leak with bypass (standard) |
| Vacuum System | Turbo molecular pump + external rotary vane pump + internal diaphragm pump |
| Sample Flow Monitoring | Optional RMS for digital measurement and logging of multiple sample lines |
| Accuracy | Typical < 0.1% relative error (application dependent) |
| Linearity | < 1% relative deviation per concentration decade (typical, application dependent) |
| Dynamic Range | 10 ppb – 100% (theoretical range, depending on configuration and application) |
| Long-Term Stability | Typical < 1% relative variation over >10 weeks (application dependent) |
| Power Requirements | 115 or 230 VAC |
| Dimensions & Weight | Approx. 52 cm (H) × 79 cm (W) × 47 cm (D), approx. 100 kg (depending on configuration) |